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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
2024-07Atomic Layer Growth of Rutile TiO2 Films with Ultrahigh Dielectric Constants via Crystal Orientation EngineeringKim, Taikyu; Jeon, Jihoon; Ryu, Seung Ho; Chung, Hong Keun; Jang, Myoungsu; Lee, Seunghyeok; Chung, Yoon Jang; Kim, Seong Keun
2024-04High-Temperature Atomic Layer Deposition of Rutile TiO2 Films on RuO2 Substrates: Interfacial Reactions and Dielectric PerformanceJeon, Jihoon; Kim, Taikyu; Jang, Myoungsu; Chung, Hong Keun; Kim, Sung-Chul; Won, Sung Ok; Park, Yongjoo; Choi, Byung Joon; Chung, Yoon Jang; Kim, Seong Keun
2024-11Interfacial layer suppression in ZrO2/TiN stack structured capacitors via atomic layer depositionJang, Myoungsu; Jeon, Jihoon; Lim, Weon Cheol; Chae, Keun Hwa; Baek, Seung-Hyub; Kim, Seong Keun
2024-08Low temperature crystallization of atomic-layer-deposited SrTiO3 films with an extremely low equivalent oxide thickness of sub-0.4 nmChung, Hong Keun; Jeon, Jihoon; Kim, Han; Jang, Myoungsu; Kim, Sung-Chul; Won, Sung Ok; Baek, In-Hwan; Chung, Yoon Jang; Han, Jeong Hwan; Cho, Sung Haeng; Park, Tae Joo; Kim, Seong Keun
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