Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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- | Effect of Substrate Bias and Hydrogen Addition on the Residual Stress of Hexagonal Boron Nitride Film Prepared by Sputtering of B4C Target with Ar/N2 Reactive Gas | JONG-KEUK, PARK; LeeJungHoon; Lee, Wook Seong; Baik, Young Joon |