Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
1994-07 | MEASUREMENT OF PARTICLE DEPOSITION VELOCITY TOWARD A HORIZONTAL SEMICONDUCTOR WAFER BY USING A WAFER SURFACE SCANNER | BAE, GN; LEE, CS; PARK, SO |
1995-10 | MEASUREMENTS AND CONTROL OF PARTICLE DEPOSITION VELOCITY ON A HORIZONTAL WAFER WITH THERMOPHORETIC EFFECT | BAE, GN; LEE, CS; PARK, SO |