DSpace at KIST

Browsing byAuthorPark, Yongjoo

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
2021-06-01Atomic-layer deposition of TiO2 thin films with a thermally stable (CpMe5) Ti(OMe)(3) precursorChung, Hong Keun; Won, Sung Ok; Park, Yongjoo; Kim, Jin-Sang; Park, Tae Joo; Kim, Seong Keun
2024-04High-Temperature Atomic Layer Deposition of Rutile TiO2 Films on RuO2 Substrates: Interfacial Reactions and Dielectric PerformanceJeon, Jihoon; Kim, Taikyu; Jang, Myoungsu; Chung, Hong Keun; Kim, Sung-Chul; Won, Sung Ok; Park, Yongjoo; Choi, Byung Joon; Chung, Yoon Jang; Kim, Seong Keun
2023-09Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasmaYang, Hae Lin; Kim, Tae-Yeon; Park, Gi-Beom; Yoon, Ara; Song, Ki-cheol; Lee, Yeonhee; Park, Jongryul; Kang, Taehyeong; Park, Yongjoo; Park, Jin-Seong
2022-02-01Y-doped HfO2 deposited by atomic layer deposition using a cocktail precursor for DRAM capacitor dielectric applicationKim, Jenam; Kim, Byung Seok; Lee, Ae Jin; Han, Dong Hee; Hwang, Ji Hyeon; Kim, Youngjin; Song, Ki-Chang; Oh, Hansol; Kim, Sangho; Park, Yongjoo; Jeon, Woojin
1

BROWSE