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Showing results 1 to 2 of 2

Issue DateTitleAuthor(s)
1996-01Nitrogen effects of Ta-Si-N diffusion barrier in Si/Cu metallization.Kim Yong Tae; S. P. Jeong; D. J. Kim; J. W. Park; Min Suk-Ki
1996-01Study of temperature dependent conductivity of Ta, Ta-Si-N thin films.Kim Yong Tae; S. P. Jeong; D. J. Kim; H. N. Lee; Min Suk-Ki
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