Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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2014-12 | Microstructure and Properties of Silicon-Incorporated DLC Film Fabricated Using HMDS Gas and RF-PECVD Process | Song, Byung Ju; Song, Woo Jin; Han, Jun Hyun; Kim, Ka Ram; Yoon, Su Jong; Kim, Tae Gyu; Kim, Jin Kon; Cho, Hyun; Kim, Gyeung-Ho; Hwang, Dae Youn; Kim, Hye Sung |