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dc.contributor.authorPark Dong Hee-
dc.contributor.authorCHOI, WON-KOOK-
dc.date.accessioned2024-01-13T00:05:06Z-
dc.date.available2024-01-13T00:05:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100101-
dc.languageEnglish-
dc.subjectlinear stationary plasma thruster-
dc.subjection beam modification-
dc.subjectpolymer surface-
dc.subjection current density-
dc.title600 mm wide linear stationary plasma thruster (LSPT) for a large area ion beam modification-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSociety of Vacuum Coater, pp.37 - 39-
dc.citation.titleSociety of Vacuum Coater-
dc.citation.startPage37-
dc.citation.endPage39-
dc.citation.conferencePlaceUS-
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KIST Conference Paper > Others
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