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dc.contributor.authorPark Dong Hee-
dc.contributor.authorYang Jeong-do-
dc.contributor.authorHONG TAE WOO-
dc.contributor.authorJi-Won Choi-
dc.contributor.authorCHOI, WON-KOOK-
dc.date.accessioned2024-01-13T00:05:21Z-
dc.date.available2024-01-13T00:05:21Z-
dc.date.created2021-09-29-
dc.identifier.issn0737-5921-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/100118-
dc.languageEnglish-
dc.subjectHIPIMS-
dc.subjectUnbalanced magnetron-
dc.subjectAZO-
dc.titleCharacteristics of Al:doped ZnO Thin Films by HIPIMS (High Power Impulse Magnetron Sputtering) with Unbalanced Magnetron-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSociety of Vacuum Coaters Technical Conference Proceedings, pp.32 - 35-
dc.citation.titleSociety of Vacuum Coaters Technical Conference Proceedings-
dc.citation.startPage32-
dc.citation.endPage35-
dc.citation.conferencePlaceUS-
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