Low-temperature crystallization and electrical properties of BST thin films by using excimer laser annealing

Authors
Kang, Min-GyuCho Kwang HwanOh Seung minKANG, CHONG YUNSangsig KimYOON, SEOK JIN
Citation
7th AMF-AMEC-2010
URI
https://pubs.kist.re.kr/handle/201004/100225
Appears in Collections:
KIST Conference Paper > Others
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