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CO sensing properties of TiO2-doped Nb2O5 thin film gas sensor by rf co-sputtering

Authors

Moon Hi Gyu; Jang Ho Won; KIM, JIN SANG; Park Hyung Ho; YOON, SEOK JIN

Citation

세라믹학회

Keywords

thin film gas sensors; rf co-sputtering; TiO2-doped Nb2O5 thin film

URI

https://pubs.kist.re.kr/handle/201004/100232

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KIST Conference Paper > Others

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