CO sensing properties of TiO2-doped Nb2O5 thin film gas sensor by rf co-sputtering

Authors
Moon Hi GyuJang Ho WonKIM, JIN SANGPark Hyung HoYOON, SEOK JIN
Citation
세라믹학회
Keywords
thin film gas sensors; rf co-sputtering; TiO2-doped Nb2O5 thin film
URI
https://pubs.kist.re.kr/handle/201004/100232
Appears in Collections:
KIST Conference Paper > Others
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