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양자점 레이저 소자의 n+/p+ GaAs기판 전극의 오믹 접합 향상 연구

Authors

Yu Ji-Hyuk; Kim Kyoung Chan; Ha Seung Kyu; Han, Il Ki

Issue Date

2009-08

Citation

제 37 회 한국진공학회 하계 정기학술대회, pp.117

Keywords

양자점 레이저; 오믹 접합; quantum dot laser; ohmic contact; TLM; electron beam evaporator; rapid thermal annealing; specific contact resistance; Auger electrons scanning

URI

https://pubs.kist.re.kr/handle/201004/100311

Appears in Collections:

KIST Conference Paper > Others

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