A nano-patterning technique utilizing surface GaAs clusters as a mask for mesa structure fabrication

Authors
Ha Seung KyuSONG, JIN-DONGLim Ju-YoungJ.S. KimS. BounouarF. DonatiniL.S. DangJ.P. PoizatChoi, Won JunLee, Jung Il
Citation
Quantum Dot 2010
Keywords
nano patterning; quantum dot; mesa fabrication; GaAs clusters; droplet epitaxy; cathodoluminesence; rapid thermal annealing
URI
https://pubs.kist.re.kr/handle/201004/100317
Appears in Collections:
KIST Conference Paper > Others
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