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dc.contributor.authorBong-Hwan Kim-
dc.contributor.authorSewan Park-
dc.contributor.authorKyuhwan Jung-
dc.contributor.authorNa, Kyounghwan-
dc.contributor.authorYoon, Eui Sung-
dc.date.accessioned2024-01-13T02:02:26Z-
dc.date.available2024-01-13T02:02:26Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101260-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectprobe card-
dc.subjectmodeling-
dc.subjecttribology-
dc.subjectwear-
dc.subjectcontact resistance-
dc.titleReliability modeling of MEMS probe card with vertical guide-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 24th International Technical Conference on Circuits/Systems, Computers and Communications-
dc.citation.titleThe 24th International Technical Conference on Circuits/Systems, Computers and Communications-
dc.citation.conferencePlaceKO-
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