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Macro/Micro residual stress analysis of Pb(Zr0.52Ti0.48)O3 Films for piezoelectric microcantilever

Authors

Lee, Jeong Hoon; Hwang Kyo Seon; Kim, Tae Song

Citation

International workshop on nanomechanical cantilever sensors

URI

https://pubs.kist.re.kr/handle/201004/101393

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KIST Conference Paper > Others

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