Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 장삼석 | - |
dc.contributor.author | 김범준 | - |
dc.contributor.author | Ji Hun Park | - |
dc.contributor.author | 김영석 | - |
dc.contributor.author | 변동진 | - |
dc.date.accessioned | 2024-01-13T02:31:12Z | - |
dc.date.available | 2024-01-13T02:31:12Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/101436 | - |
dc.subject | ZnO | - |
dc.subject | RTA | - |
dc.subject | ALD | - |
dc.title.alternative | ALD법으로 성장시킨 ZnO 박막의 RTA 처리에 따른 전기적 특성변화 | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 한국재료학회 | - |
dc.citation.title | 한국재료학회 | - |
dc.citation.conferencePlace | KO | - |
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