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Other Titles

ALD법으로 성장시킨 ZnO 박막의 RTA 처리에 따른 전기적 특성변화

Authors

장삼석; 김범준; Ji Hun Park; 김영석; 변동진

Citation

한국재료학회

Keywords

ZnO; RTA; ALD

URI

https://pubs.kist.re.kr/handle/201004/101436

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KIST Conference Paper > Others

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