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dc.contributor.authorYoungsoo, Kim-
dc.contributor.authorKang-Jin Kim-
dc.contributor.authorLEE, YEON HEE-
dc.date.accessioned2024-01-13T03:04:00Z-
dc.date.available2024-01-13T03:04:00Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101899-
dc.languageEnglish-
dc.subjectfluorine-
dc.subjectplasma polymerization-
dc.subjectICP-
dc.subjectCCP-
dc.subjectXPS-
dc.subjectTOF-SIMS-
dc.titleAnalysis of fluorine-containing thin films using surface techniques-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 9th Asian conference on analytical sciences, pp.266-
dc.citation.titleThe 9th Asian conference on analytical sciences-
dc.citation.startPage266-
dc.citation.conferencePlaceKO-
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