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dc.contributor.authorKim Chung Soo-
dc.contributor.authorEun Tae Kim-
dc.contributor.authorJeong Yong Lee-
dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-13T03:30:42Z-
dc.date.available2024-01-13T03:30:42Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101931-
dc.languageEnglish-
dc.subjectIn-Sb-Te (IST)-
dc.subjectIn3SbTe2-
dc.subjectphase change-
dc.subjectchalcogenide-
dc.subjectTEM-
dc.titleMicrostructure alanysis of In-Sb-Te thin films deposited by RF magnetron sputtering-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationThe 14th International Symposium on the Physics of Semiconductor and Application (ISPSA), pp.309-
dc.citation.titleThe 14th International Symposium on the Physics of Semiconductor and Application (ISPSA)-
dc.citation.startPage309-
dc.citation.endPage309-
dc.citation.conferencePlaceKO-
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