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dc.contributor.authorYoon, Eui Sung-
dc.contributor.authorArvind Singh-
dc.contributor.authorPham Duc Cuong-
dc.contributor.authorKIM, JINSEOK-
dc.contributor.authorYang Sung Wook-
dc.date.accessioned2024-01-13T03:34:05Z-
dc.date.available2024-01-13T03:34:05Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/102169-
dc.languageEnglish-
dc.subjectMEMS devices-
dc.subjectsurface modification-
dc.subjectcoatings-
dc.titleCombined Surface Treatments to Improve Micro-Tribological Properties of Silicon Surfaces-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSociety of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition-
dc.citation.titleSociety of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition-
dc.citation.conferencePlaceUS-
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