Combined Surface Treatments to Improve Micro-Tribological Properties of Silicon Surfaces

Authors
Yoon, Eui SungArvind SinghPham Duc CuongKIM, JINSEOKYang Sung Wook
Citation
Society of Tribologists and Lubrication Engineers 63rd Annual Meeting and Exibition
Keywords
MEMS devices; surface modification; coatings
URI
https://pubs.kist.re.kr/handle/201004/102169
Appears in Collections:
KIST Conference Paper > Others
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