Surface Morphology of Compressively Stressed Film Deposited on a Soft Polymer

Authors
Myoung-Woon MoonSk. F. AhmedYi Jin WooLee, Kwang Ryeol
Citation
ICMCTF2008
Keywords
wrinkle; dlc; compressive stress; pdms; dlc
URI
https://pubs.kist.re.kr/handle/201004/102687
Appears in Collections:
KIST Conference Paper > Others
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