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Crystal structure variation with excess Sb atoms of the δ-region SbTe binary phase change thin films

Authors

Kim, Yong Tae; Youm Minsoo; Man Young Sung

Citation

Advanced Semiconductor Processes and Equipments (2007 Korea-Japan Joint Workshop)

URI

https://pubs.kist.re.kr/handle/201004/103210

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KIST Conference Paper > Others

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