Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang Gil Bum | - |
| dc.contributor.author | Kim, Seong Il | - |
| dc.contributor.author | Kim, Yong Tae | - |
| dc.contributor.author | Lee Chang Woo | - |
| dc.date.accessioned | 2024-01-13T06:03:16Z | - |
| dc.date.available | 2024-01-13T06:03:16Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/103455 | - |
| dc.language | English | - |
| dc.subject | Metal nanodot | - |
| dc.subject | copolymer lithography | - |
| dc.subject | Reactive ion etching | - |
| dc.title | Fabrication of Metal Nano Dot Dry Etching Mask Using Block Copolymer Thin Film | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | NANO KOREA 2007, pp.272 | - |
| dc.citation.title | NANO KOREA 2007 | - |
| dc.citation.startPage | 272 | - |
| dc.citation.endPage | 272 | - |
| dc.citation.conferencePlace | KO | - |
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