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dc.contributor.authorKang Gil Bum-
dc.contributor.authorKim, Seong Il-
dc.contributor.authorKim, Young Hwan-
dc.contributor.authorPark, Min Chul-
dc.contributor.authorLee Chang Woo-
dc.contributor.authorKim, Yong Tae-
dc.date.accessioned2024-01-13T06:03:35Z-
dc.date.available2024-01-13T06:03:35Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103477-
dc.languageEnglish-
dc.subjectdiblock copolymer-
dc.subjectcopolymer lithography-
dc.subjectreactive ion etching-
dc.subjectSi nano dot-
dc.subjectnanotemplate-
dc.titleNanodot Arrays Patterned Using Diblock Copolymer Templates-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational Symposium of Electroceramics 2007, pp.35-
dc.citation.titleInternational Symposium of Electroceramics 2007-
dc.citation.startPage35-
dc.citation.endPage35-
dc.citation.conferencePlaceKO-
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