DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKim Dong-Ik-
dc.contributor.authorHyo-Jong Lee-
dc.contributor.authorKyu Hwan Oh-
dc.contributor.authorHu-Chul Lee-
dc.date.accessioned2024-01-13T06:33:39Z-
dc.date.available2024-01-13T06:33:39Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103749-
dc.languageEnglish-
dc.subjectCu-
dc.subjectinterconnect-
dc.subjectdamascene-
dc.subjectEBSD-
dc.subjectrecrystallization-
dc.titleInvestigation into the Recrystallization Phenomena of Cu Damascene Line-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation16th International Microscopy Congress-
dc.citation.title16th International Microscopy Congress-
dc.citation.conferencePlaceJA-
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