DSpace at KIST: Investigation into the Recrystallization Phenomena of Cu Damascene Line

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DC Field	Value	Language
dc.contributor.author	Kim Dong-Ik	-
dc.contributor.author	Hyo-Jong Lee	-
dc.contributor.author	Kyu Hwan Oh	-
dc.contributor.author	Hu-Chul Lee	-
dc.date.accessioned	2024-01-13T06:33:39Z	-
dc.date.available	2024-01-13T06:33:39Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/103749	-
dc.language	English	-
dc.subject	Cu	-
dc.subject	interconnect	-
dc.subject	damascene	-
dc.subject	EBSD	-
dc.subject	recrystallization	-
dc.title	Investigation into the Recrystallization Phenomena of Cu Damascene Line	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	16th International Microscopy Congress	-
dc.citation.title	16th International Microscopy Congress	-
dc.citation.conferencePlace	JA	-

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