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dc.contributor.authorKim Tae Ha-
dc.contributor.authorLee Intaek-
dc.contributor.authorMyung-Suk Chun-
dc.contributor.authorLee Kangtaek-
dc.date.accessioned2024-01-13T07:03:09Z-
dc.date.available2024-01-13T07:03:09Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103984-
dc.languageEnglish-
dc.subjectMEMS Fabrication-
dc.subjectMicrochip Electrophoresis-
dc.subjectQuartz-
dc.subjectGlass-
dc.subjectPoly-Silicon-
dc.subjectEtching-
dc.titleMEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis-
dc.title.alternative마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국화학공학회 추계-
dc.citation.title한국화학공학회 추계-
dc.citation.conferencePlaceKO-
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