Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | JONG-KEUK, PARK | - |
dc.contributor.author | Baik, Young Joon | - |
dc.date.accessioned | 2024-01-13T07:30:42Z | - |
dc.date.available | 2024-01-13T07:30:42Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/104068 | - |
dc.language | English | - |
dc.title | Hardness and thermal stbility of c-TiAlN/a-Si3N4 nanoscale multilayered film | - |
dc.title.alternative | 결정질-TiAlN/비정질-Si3N4 나노 다층막의 경도 및 열적 안정성 | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 2006년도 한국표면공학회 춘계 학술발표회 | - |
dc.citation.title | 2006년도 한국표면공학회 춘계 학술발표회 | - |
dc.citation.conferencePlace | KO | - |
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