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dc.contributor.authorRyu, Jaewook-
dc.contributor.authorKim, Jin Hyeck-
dc.contributor.authorChu sung il-
dc.contributor.authorMoon, Sung Wook-
dc.date.accessioned2024-01-13T07:31:13Z-
dc.date.available2024-01-13T07:31:13Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104104-
dc.languageEnglish-
dc.titleFabrication and Mechanical Characterization of MEMS Based Vertical Probe Tips for Measurements of Micro Pads-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationMicroprocesses and Nanotechnology 2006, pp.340 - 341-
dc.citation.titleMicroprocesses and Nanotechnology 2006-
dc.citation.startPage340-
dc.citation.endPage341-
dc.citation.conferencePlaceJA-
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