Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Yong Tae | - |
| dc.contributor.author | Chang Woo Lee | - |
| dc.date.accessioned | 2024-01-13T07:32:37Z | - |
| dc.date.available | 2024-01-13T07:32:37Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/104201 | - |
| dc.language | English | - |
| dc.subject | diffusion barrier | - |
| dc.subject | tungsten nitride | - |
| dc.title | Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Meeting of The Electrochemical Society | - |
| dc.citation.title | Meeting of The Electrochemical Society | - |
| dc.citation.conferencePlace | US | - |
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