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dc.contributor.authorKim Tae-hoon-
dc.contributor.authorShin Sang-Hoon-
dc.contributor.authorKim In-ho-
dc.contributor.authorKIM, WON MOK-
dc.contributor.authorLee, Jeon Kook-
dc.date.accessioned2024-01-13T08:03:42Z-
dc.date.available2024-01-13T08:03:42Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104545-
dc.languageEnglish-
dc.subjectAlGaZnO-
dc.subjectTransparent Conductive Oxide-
dc.subjectCo-sputtering-
dc.subjectLattice distortion-
dc.subjectelectrtical resistivity-
dc.titleLattice distortion of transparent conductive AlGaZnO thin films prepared by RF magnetron sputtering-
dc.title.alternativeRF 스퍼터링으로 제조된 AlGaZnO 투명전도성 산화물 박막의 격자변형-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational Conference on Electroceramics-
dc.citation.titleInternational Conference on Electroceramics-
dc.citation.conferencePlaceKO-
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