Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | KO JI HOON | - |
dc.contributor.author | Kim In-ho | - |
dc.contributor.author | 김동환 | - |
dc.contributor.author | LEE, KYEONG SEOK | - |
dc.contributor.author | JONG-KEUK, PARK | - |
dc.contributor.author | LEE, TAEK SUNG | - |
dc.contributor.author | Baik, Young Joon | - |
dc.contributor.author | CHEONG, BYUNG KI | - |
dc.contributor.author | KIM, WON MOK | - |
dc.date.accessioned | 2024-01-13T08:30:42Z | - |
dc.date.available | 2024-01-13T08:30:42Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/104602 | - |
dc.language | English | - |
dc.subject | Transparent conduction oxide | - |
dc.subject | sputtering | - |
dc.subject | combinatorial | - |
dc.subject | annealing | - |
dc.title | Annealing effect of Zn-Sn-O films deposited using combinatorial method | - |
dc.title.alternative | Combinatorial 방법으로 증착한 Zn-Sn-O계 박막의 열처리 효과 | - |
dc.type | Conference | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 한국전기전자재료학회, v.5, no.2, pp.998 - 1001 | - |
dc.citation.title | 한국전기전자재료학회 | - |
dc.citation.volume | 5 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 998 | - |
dc.citation.endPage | 1001 | - |
dc.citation.conferencePlace | KO | - |
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