KIST Library Institutional Repository

Annealing effect of Zn-Sn-O films deposited using combinatorial method

Other Titles

Combinatorial 방법으로 증착한 Zn-Sn-O계 박막의 열처리 효과

Authors

KO JI HOON; Kim In-ho; 김동환; LEE, KYEONG SEOK; JONG-KEUK, PARK; LEE, TAEK SUNG; Baik, Young Joon; CHEONG, BYUNG KI; KIM, WON MOK

Citation

한국전기전자재료학회, v.5, no.2, pp.998 - 1001

Keywords

Transparent conduction oxide; sputtering; combinatorial; annealing

URI

https://pubs.kist.re.kr/handle/201004/104602

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML