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Growth and characterizaton of SiC film using single precursors

Other Titles

단일 전구체를 이용한 SiC 박막의 성장과 특성평가

Authors

KIM NA-RI; Kim, Jae Soo; 변동진; 이재훈; 노대호; 진정근

Citation

2004년 추계 세라믹학회, pp.137

URI

https://pubs.kist.re.kr/handle/201004/104612

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KIST Conference Paper > Others

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