KIST Library Institutional Repository

Growth of SiC nanowire using HMDS and APCVD on Si substrate

Authors

노대호; Kim, Jae Soo; 변동진; 이재훈; KIM NA-RI

Citation

EUROMAT2005

Keywords

HMDS; SIC nanowire; APCVD

URI

https://pubs.kist.re.kr/handle/201004/104660

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML