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CVD법에 의한 SiCN 나노와이어의 성장

Authors

Ahn myoung-won; 양재웅; Kim, Jae Soo; 이재훈; 노대호; KIM NA-RI

Issue Date

2005-10

Citation

2005년 대한금속재료학회 추계학술대회, pp.127

Keywords

CVD; SiCN; nanowire

URI

https://pubs.kist.re.kr/handle/201004/104674

Appears in Collections:

KIST Conference Paper > Others

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