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dc.contributor.authorKIM NA-RI-
dc.contributor.author변동진-
dc.contributor.author노대호-
dc.contributor.author양재웅-
dc.contributor.authorAhn myoung-won-
dc.contributor.author이재훈-
dc.contributor.authorKim, Jae Soo-
dc.date.accessioned2024-01-13T08:31:49Z-
dc.date.available2024-01-13T08:31:49Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104676-
dc.subjectTetramethylsilane-
dc.subjectSiC film-
dc.subjectCVD-
dc.title.alternativeTetramethylsilane을 이용한 SiC 박막의 성장-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation2005년 대한금속재료학회 추계학술대회, pp.124-
dc.citation.title2005년 대한금속재료학회 추계학술대회-
dc.citation.startPage124-
dc.citation.endPage124-
dc.citation.conferencePlaceKO-
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