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PRAM소자를 위한 GST의 결정화 및 HRTEM분석

Authors

Kim, Yong Tae; Park Yu Jin; 이정용; Kim, Seong Il; 염민수; 성만영

Issue Date

2005-09

Citation

한국 반도체 및 디스플레이 장비 학회 2005년도

URI

https://pubs.kist.re.kr/handle/201004/104756

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KIST Conference Paper > Others

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