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dc.contributor.authorKang Gil Bum-
dc.contributor.authorKim, Seong Il-
dc.contributor.authorKim, Yong Tae-
dc.contributor.authorKim, Young Hwan-
dc.contributor.authorPark, Min Chul-
dc.contributor.authorKim, Sangjin-
dc.contributor.author이창우-
dc.date.accessioned2024-01-13T08:32:59Z-
dc.date.available2024-01-13T08:32:59Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104758-
dc.languageEnglish-
dc.titleFabrication of nanopatterns by using diblock copolymer-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation한국반도체및디스플레이장비학회 2005년도 추계학술대회-
dc.citation.title한국반도체및디스플레이장비학회 2005년도 추계학술대회-
dc.citation.conferencePlaceKO-
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