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Fabrication of nanopatterns by using diblock copolymer

Authors

Kang Gil Bum; Kim, Seong Il; Kim, Yong Tae; Kim, Young Hwan; Park, Min Chul; Kim, Sangjin; 이창우

Citation

한국반도체및디스플레이장비학회 2005년도 추계학술대회

URI

https://pubs.kist.re.kr/handle/201004/104758

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