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Wafer direct bonding between InP and GGG(Gd3Ga5O12) using O2 plasma

Other Titles

O2 플라즈마를 이용한 InP와 GGG 간의 웨이퍼 직접 접합

Authors

Roh Jong Wook; YANG, JEONG SU; 옥성해; Lee, Seok; Woo, Deok Ha; Byun, Young Tae; Jhon, Young Min; 이우영

Citation

Photonics Conference 2005, pp.191 - 192

Keywords

O2 플라즈마; GGG; InP; 웨이퍼 직접 접합

URI

https://pubs.kist.re.kr/handle/201004/104805

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KIST Conference Paper > Others

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