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dc.contributor.authorV.E. Pukha-
dc.contributor.authorA.N. Stetsenko-
dc.contributor.authorS.N. Dub-
dc.contributor.authorLee, Joong Kee-
dc.date.accessioned2024-01-13T09:00:40Z-
dc.date.available2024-01-13T09:00:40Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104864-
dc.languageEnglish-
dc.subjectDLC-
dc.subjectfilm-
dc.subjectfullerene-
dc.subjectC60-
dc.subjection beam-
dc.titleDIAMOND-LIKE CARBON THIN FILMS OBTAINED FROM MONOENERGETIC FULLERENE C60 ION BEAM-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationISE2005, pp.763-
dc.citation.titleISE2005-
dc.citation.startPage763-
dc.citation.endPage763-
dc.citation.conferencePlaceKO-
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KIST Conference Paper > Others
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