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dc.contributor.authorSingh, Arvind-
dc.contributor.authorYoon, Eui Sung-
dc.contributor.authorHAN, HUNG GU-
dc.contributor.authorKong, Hosung-
dc.date.accessioned2024-01-13T09:30:24Z-
dc.date.available2024-01-13T09:30:24Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/105113-
dc.languageEnglish-
dc.subjectnano-
dc.subjectmicro-
dc.subjectfriction-
dc.subjectSAM-
dc.subjectAFM-
dc.subjectCVD-
dc.titleFriction Characteristics of Self-assembled Monolayers Coated on Si-wafer by Chemical Vapor Deposition at Nano/Micro-scale-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationWorld Tribology Congress III, Washington D.C., USA, pp.1 - 2-
dc.citation.titleWorld Tribology Congress III, Washington D.C., USA-
dc.citation.startPage1-
dc.citation.endPage2-
dc.citation.conferencePlaceUS-
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