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Friction Characteristics of Self-assembled Monolayers Coated on Si-wafer by Chemical Vapor Deposition at Nano/Micro-scale

Authors

Singh, Arvind; Yoon, Eui Sung; HAN, HUNG GU; Kong, Hosung

Citation

World Tribology Congress III, Washington D.C., USA, pp.1 - 2

Keywords

nano; micro; friction; SAM; AFM; CVD

URI

https://pubs.kist.re.kr/handle/201004/105113

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KIST Conference Paper > Others

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