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Analysis of micro cantilever deflection by thermal bubbles

Other Titles

열기포에 의한 마이크로 빔의 변형 실험과 해석

Authors

LEE, HEON JU; Chang, Young Soo; Kim, Ho-Young; Jong Seob, Ahn; Lee, Yoon Pyo

Citation

대한기계학회 2005년도 춘계학술대회, pp.2630 - 2635

Keywords

열기포; 캔틸레버

URI

https://pubs.kist.re.kr/handle/201004/105175

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KIST Conference Paper > Others

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