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Surface micromachined uncooled microbolometer based-on vanadium-tungsten oxide

Authors

HAN YONG HEE; Kim Kun Tae; NGUYEN CHI ANH; Shin, Hyun Joon; Moon, Sung Wook; Choi, In Hoon

Citation

ICMAT(3rd International Conference on Materials for Advanced Technologies) 2005, Symposium F: Nano-O

Keywords

microbolometer; surface micromachining; vanadium-tungsten oxide

URI

https://pubs.kist.re.kr/handle/201004/105179

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KIST Conference Paper > Others

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