Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ai Ying Wang | - |
| dc.contributor.author | Lee, Kwang Ryeol | - |
| dc.date.accessioned | 2024-01-13T10:32:47Z | - |
| dc.date.available | 2024-01-13T10:32:47Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/105803 | - |
| dc.language | English | - |
| dc.subject | DLC | - |
| dc.subject | hybrid ion beam | - |
| dc.subject | stress | - |
| dc.subject | structure | - |
| dc.title | Effect of Substrate Bias on Structure and Properties of W Incorporated Diamond-like Carbon Films | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Mat. Res. Soc. Symp. Proc., v.821, pp.P3.22.1 - P3.22.6 | - |
| dc.citation.title | Mat. Res. Soc. Symp. Proc. | - |
| dc.citation.volume | 821 | - |
| dc.citation.startPage | P3.22.1 | - |
| dc.citation.endPage | P3.22.6 | - |
| dc.citation.conferencePlace | US | - |
- Appears in Collections:
- KIST Conference Paper > Others
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
KIST 리포지터리는 국립중앙도서관 OAK 보급사업으로 구축되었습니다.