DSpace at KIST: An Study of Influence of Imperfections on the Delamination of Diamond-like Carbon Films

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DC Field	Value	Language
dc.contributor.author	Myoung Woon Moon	-
dc.contributor.author	Lee, Kwang Ryeol	-
dc.contributor.author	정진원	-
dc.contributor.author	오규환	-
dc.date.accessioned	2024-01-13T10:32:49Z	-
dc.date.available	2024-01-13T10:32:49Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/105805	-
dc.language	English	-
dc.subject	DLC	-
dc.subject	Delamination	-
dc.subject	Chemical vapor deposition (CVD)	-
dc.subject	Defect	-
dc.subject	FIB	-
dc.title	An Study of Influence of Imperfections on the Delamination of Diamond-like Carbon Films	-
dc.type	Conference	-
dc.description.journalClass	1	-
dc.identifier.bibliographicCitation	Mat. Res. Soc. Symposium Proceeding, v.719, pp.F8.36.1 - F8.36.5	-
dc.citation.title	Mat. Res. Soc. Symposium Proceeding	-
dc.citation.volume	719	-
dc.citation.startPage	F8.36.1	-
dc.citation.endPage	F8.36.5	-
dc.citation.conferencePlace	US	-

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