Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Juno | - |
| dc.contributor.author | Kwak, Soonjong | - |
| dc.date.accessioned | 2024-01-13T10:33:45Z | - |
| dc.date.available | 2024-01-13T10:33:45Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/105868 | - |
| dc.language | English | - |
| dc.subject | silicon oxynitride | - |
| dc.subject | plasma enhanced chemical vapor deposition | - |
| dc.subject | gas barrier | - |
| dc.subject | plastic substrate | - |
| dc.title | Plasma-enhanced chemical vapor deposition of silicon oxynitride films and their gas barrier properties | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Polymer Processing Society | - |
| dc.citation.title | Polymer Processing Society | - |
| dc.citation.conferencePlace | US | - |
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