Fabrication of 1x16 array micro collimator and characteristic evaluation

Other Titles
1x16 어레이 마이크로 collimator 제작 및 특성 평가
Authors
Kim, Shin KeunKwon, Gwang MinShin, Hyun JoonMoon, Sung Wook
Citation
제6회 한국 MEMS 학술대회, pp.622 - 626
Keywords
micro collimator; 어레이; 렌즈; mems; CPL (collimator path length); reflowing method; PMER fiber connector; silicon connector; active or passive alignment
URI
https://pubs.kist.re.kr/handle/201004/105914
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KIST Conference Paper > Others
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