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dc.contributor.authorJONG-YEON PARK-
dc.contributor.authorKIM GEUN TAE-
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorPARK JEONG HO-
dc.date.accessioned2024-01-13T11:03:04Z-
dc.date.available2024-01-13T11:03:04Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/106088-
dc.languageEnglish-
dc.subjectplastic micromachining-
dc.subjectPDMS-
dc.subject3D MEMS-
dc.subjectUV-lithography-
dc.subjectmesh structure bonding-
dc.titleFabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation17th European Conference on Solid-State Transducers-
dc.citation.title17th European Conference on Solid-State Transducers-
dc.citation.conferencePlacePO-
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